Take it one step at a time
The IntelliSuite architecture is based upon process elements — familiar process steps such as photolithography, thin film deposition, selective etching form the basis of understanding the final device geometries. By systematically building the prototype in IntelliSuite one can identify costly process bugs before entering the fab. The process steps combined with the mask geometries can be used to build the final virtual device. (Power users can also import 3D geometries from popular CAD programs).

Real world connections
IntelliSuite features a comprehensive material database which allows you to understand material properties such as conductivity, film stresses and mechanical strength as a function of processing parameters. This allows you to create more realistic models. In addition, a full anisotropic etch modeler is also provided allowing you create realistic models of your KOH, TMAH or EDP etches.

Taking the complexity out of meshing…

IntelliSuite gives you as much control over the device meshing process as you need. On one hand automatic meshing tools can generate near optimal meshes while on the other interactive tools allow you to further refine the meshes to your hearts' content. Think of it as the Tiptronic™ of meshing tools allowing you to switch from automatic to manual gears. Our attention to real world usage patterns and ease of learning, means that you will spend more time on the design and less time poring through manuals.

Analyze this!
IntelliSuite comes with all the modules that you need to perform fully coupled electrical, piezoelectric, thermal and mechanical modeling of the MEMS device. Optional modules for electromagnetic and fluidic analysis are available. Out of the box, you can analyze almost any MEMS device that you can dream up! The IntelliSuite virtual device can be subjected to a combination of inputs such as voltage, electromagnetic fields, temperature, mechanical stresses and pressures and fluid flow. A systematic sensitivity analysis can be performed to understand the device response to the external environment.

Open system
IntelliSuite is designed to be an open system that fits well with other tools. We speak a wide range of file formats ranging from DXF and GDS II (for mask import and export) to IGES and PATRAN (solid model or FEA input) to ABAQUS, ANSYS (FEA model import and export) to Touchstone (high frequency analysis). Our macromodels can be used in conjunctions with SPICE for further system integration. All of the analysis results and solid models can be exported to AVI or JPG format for adding panache to your next presentation or report. In addition, all of our file formats are rigourously documented and available. This means unlike other tools on the market, vendor lock-in is never an issue.