A CAD Architecture for Microelectromechanical Systems

A Generalized Computational Formulation and Model for Transport and Stoichimoetry

A Novel Microelectrochemical Gas Sensor

Accurate Fully-Coupled Natural Frequency Shift of MEMS Actuators due to voltage bias and other external forces

An Improved Meshing Technique and its Application in the Analysis of Large and Complex MEMS Systems

Application of Mechanical-Technology CAD to Microelectronic Device Design and Manufacturing

Arnoldy based passive model order reduction algorithm

Automatic Generation of a 3-D Solid Model of a Microfabricated Structure

CAD Modeling of Scratch-Drive Actuation

Calibrated Measurements of Elastic Limit Modulus and the Residual Stress

Coupled Electromechanical and Full wave Electromagnetic Analysis of Micromachined Electromechanically Tunable Capacitors

Design of a Novel Bulk Micro-machined RF MEMS Switch

Design to Succeed Integrated MEMS Development

Effect of squeezed film damping on dynamic finite element analysis of MEMS

Efficient process development for bulk silicon etching using cellular automata simulation techniques

Experimental Investigation, Modeling, and Simulations for MEMS Based Gas Sensor Used for Monitoring Process Chambers in Se

Fully Coupled Computational Modeling of Transport Phenomena in Microfluidics Applications

General Contact and Hysteresis Analysis of Multi-Dielectric MEMS Devices Under Thermal and Electrostatic Actuation

General MEMS Process Physics Simulation and its Applications

Incorporating CAD for MEMS tools into the Academic Environment

Integrated MEMS Development

IntelliCAD'98 optimizes MEMS design

Large Scale Application Opportunities and Cost Reduction Issues in MEMS

MEMS Computer-aided Design

MEMS Process Simulation and Device Analysis

Manufacturing Issues in High Precision Microfabricated Sensors

Microelectromechanical systems based advanced high performance radio frequency systems

Microfluidic MEMS enabling novel biomedical applications

Numerical Simulation of Micro-Assembly Techniques in MEMS Devices

Numerical Simulation of Micro-Assembly of MEMS Devices and post assembly electromechanical actuation

Optical fiber interferometer for measuring the in-situ deflection characteristics of microelectromechanical structures

Opto-Mechanical Modeling for Fabrication of MEMS Micromirrors

Reducing MEMS Product Development and Commercialization Time

Simulations based design of an electrostatically actuated microrelay

Stability Criterion for Microscale Concentric Flow of Two Immiscible Liquids

Unified Computational Models for Microfluidics-Specific Applications

Verification of FEM Analysis of Load-Deflection Methods for Measuring Mechanical Properties of Thin-Films

Viscoelasticity and Creep Recovery of Polyimide Thin Films