Henry David Thoreau once wrote, "Simplify. Simplify. Simplify." Thoreau would be pleased that we took his dictum to heart. Our mission in developing IntelliSuite is to remove the complexity inherent in the process of MEMS design. We worry about solving the most challenging MEMS problems so that you don't have to.

At IntelliSense we know that simplicity matters. Precision matters. And your creativity matters most.

A-Z for manufacturable designs

Achieve First Time Right designs with our vast feature set geared towards manufacturable design

Anisotropic Etch Simulation •Bosch Process Simulation •Cost Modeling •Design For Manufacturing • Engineering Document Control • Foundry Templates • GDSII/DXF support • Hierarchical modeling •Intuitive user interfaces •JEDEC test simulations •Knowledge Repositories • Layout automation • Material Databases • Normal distribution and six sigma modeling •Optimization tools • Process flow visualization • Quality control • Residual stress calculations • Sensitivity studies • Test structure suite • ULSI-MEMS integration •Virtual Prototyping •Wafer Level Packaging Simulations •X-ref capability •Yield prediction and improvement tools •Zero defect design

Do it faster

IntelliSuite™ was designed from the ground up for MEMS. Unlike other products in the market that are a patchwork of tools from multiple vendors loosely sewn together, the engines that drive IntelliSuite have been fine tuned for MEMS applications. Some of the highlights include:

• Exposed faced meshing algorithm for Electrostatic simulations that allows you to perform coupled thermo-electrostatic-mechanical analysis over 800% faster than other industry tools

• Specialized Squeeze film damping code that has a 15x performance gain over standard Navier Stokes solvers

• SYNPLE system simulations by pass the need to compute the Jacobian, resulting in a 4-5x speed performance over other system simulation engines

• System Model Extraction techniques allow you to accurately capture transient electro-mechanical behavior over a 100x faster than using pure Finite Element analysis.

System models that you can trust

IntelliSense's proprietary System Model Extraction is the only MEMS tool that creates arbitrary N-DOF compact system models that fully capture the harmonic sub-harmonic response of even the most highly-non-linear MEMS. All other tools are limited to primitive 6DOF linear rigid body simulations.

Whether you are designing simple readout circuitry, feedback loops or other complex control circuitry, you can do so with confidence.

Simulate don't emulate

IntelliSense is the only vendor that supplies TCAD tools for MEMS. With innovate tools like AnisE and RECIPE you can fully model complex wet and dry anisotropic etching of silicon. Emulation tools supplied by other vendors cannot simulate complex etch phenomenon. AnisE gives you the ability to understand the wet etch evolution (KOH/TMAH) as a function of an arbitrary mask over time. RECIPE is our latest RIE/ICP/Bosch process simulator, you can use it to simulate complex etch phenomenon such as RIE lag, scalloping, pinch-off effects and other mask loading effects.

Dynamics done right

Here is a dirty secret for you — all the other tools on the market which claim to perform coupled electromechanical dynamic analysis are limited to quasi-static analysis. IntelliSuite is the only software which goes beyond quasi-static analysis to perform full dynamic simulation of MEMS.

Complex system and device level dynamics simulation can be accurately performed in SYNPLE on 100-200x faster than equivalent FEA modeling.

Real world connections

IntelliSuite features a comprehensive material databases which allows you to understand material properties such as conductivity, film stresses and mechanical strength as a function of processing parameters. This allows you to create more realistic models. In addition, IntelliSuite supplies foundry ready templates for a number of popular industry process flows. Just plug in your mask-sets and you will be up and running!

Avoid costly mistakes

IntelliSense is the only vendor that supplies cost models that directly tie the production costs to the fabrication sequence. The MEMS Cost Model allows managers and engineers to perform scenario analyses to understand the impact of the process flow, wafer yield, die size and die yield on the final cost of the production.

Should you outsource the production of the product to Taiwan? Should you use an ICP based etch step in your process flow? Are your fab utilization and depreciation rates affecting the margins? The MEMS Cost Model is designed to make these decisions easy to understand.

A living design environment™

Unlike other tools, IntelliSuite is a tightly integrated design environment that will link your entire MEMS organization together. Built to scale from a point tool to an organization-wide tool, IntelliSuite unifies various engineering and manufacturing tasks into a single living design environment. Whether you are a device, process, packaging or test engineer, a system architect, or an engineering manager — you will have a full suite of tools at your disposal to perform your job more efficiently.