IntelliSuite — Modules

Process modeling
	MEMaterial (Database & process optimization)
	AnisE (Si Wet Anisotropic etch)
	RECIPE (RIE/ICP Simulator)
	IntelliFAB (Process visual.)

Design Tools
	IntelliMask (Layout)
	IntelliMask Pro (Layout)
	3D Builder

Analysis modules
	Thermoelectromechanical
	Packaging
	PiezoMEMS
	ElectroMagnetics & RF MEMS
	BioMEMS & MicroFluidics

System modeling
	System Model Extractor (SME)
	SYNPLE (System simulation)
	EDA Linker

Economic modeling
	Cost Modeler

Overview
	IntelliSuite 8 Overview (3.8 MB)
	Process tools (2.7 MB)
	Design tools (1 MB)
	Analysis & verification (4.0 MB)
	System simulation tools (1.5 MB)
	Consolidated datasheets (9.5 MB)
Process & design modules
	AnisE (Si Anisotropic etch)
	RECIPE (RIE/ICP etch)
	IntelliFAB (Process visualization)
	MEMaterial (Knowledge base)
	IntelliMask (Layout)
Analysis modules
	Fully coupled ThermoElectroMechanical Analysis (TEM)
	PiezoMEMS
	RF / High frequency MEMS Electromagnetics Analysis
	BioMEMS/Microfluidics
	Packaging Analysis
System modeling
	System model extraction
	SYNPLE

	BioMEMS
	RF MEMS
	Optics and MOEMS
	Mechanism design
	Sensors
	Fluidics

	Recent publications
	User contributed publications

	Alliances
	University partnerships
	Jobs at IntelliSense

	Send us your feedback, request more information or contact us.

IntelliSuite was designed in a modular fashion so that you can choose the functionality that you want without overpaying. Our flexible purchasing policy allows you to buy individual modules at a later stage to add to your functionality.

The world's most advanced MEMS CAD/EDA

IntelliSuite 8

Process modeling tools