IntelliSense introduces a new class of tools for dramatically reducing the computational time to perform accurate dynamic analysis of MEMS. Based upon cutting-edge, Krylov sub-space model reduction algorithms, very large non-linear thermo-electromechanical FEM models can be reduced into computationally efficient behavioral models.
These behavioral models fully capture the complex non-linear dynamics inherent in MEMS due to electrostatic forces, residual stresses, squeeze film damping, and multiple mechanical degrees of freedom. These models fully capture all of the harmonic modes of the MEMS so that you can fully account for sub-harmonic contributions while developing readout or control electronics.
Rather than using toy reduced order models (ROM) based on textbook equations, you can create sophisticated models that accurately capture the inherent physics of your device. These models match FE simulations in accuracy but are 100-1000 times faster than traditional FE based simulations.
The system model extraction tools come with a variety of options allowing you to create models of varying complexity. For instance, you can create a simple model based on rigid body assumptions and then fine tune by accounting for non-linear deformation and second order effects such as packaging related stresses, CTE mismatches, effects of packaging pressure on device damping, and parasitics.
Dynamic n-DOF system compact models IntelliSuite system models are dynamic arbitrary degree of freedom models. The system models are not limited to small displacements; non-linear large displacement MEMS can be handled with panache. IntelliSuite is the only tool on the market that gives you the freedom to create arbitrary degree of freedom compact models to make sure that you capture all the important aspects of the device performance. The interface allows you to easily specify areas or nodes of interest. The device models can be compacted to a system model that you can then use in a system simulator.
Lagrangian mechanics The system model extraction tools fully capture the mechanics of the system. All translational and rotational degrees of freedom, masses, spring behavior including cubic stiffening, and moments of inertia are accurately captured. Our algorithms take process-induced residual stresses into account as well. Multi-layered pre-stressed structures, which are the bane of other CAD tools, can be captured by the behavioral models as well.
Control freak Our years of hardware expertise in developing complex closed loop controls for optical MEMS have taught us the importance of understanding harmonic and sub-harmonic responses. IntelliSuite behavioral models can fully capture the different modes and their responses, so that you can investigate poles and zeros, Nyquist stability criteria, gain and phase margins with ease.
Multiple electrical degrees of freedom are also included in system models, as are non-linear electrostatics and 3D squeeze film damping.
Platform independent models IntelliSuite System models can be exported into a variety of industry HDL formats. You can also use the system models with other popular system modeling tools such as Matlab/Simulink or Modelica.
All of the features, none of the price
Here is the feature that many of you will like the best - System Model Extraction tools come free with every copy of IntelliSuite. That's right! No additional modules to purchase!
The System Model Extraction tools are fully integrated within our Thermo-Electro-Mechanical analysis module. It is built-in, not bolted on - seamlessly integrated into the IntelliSuite environment.
Whether you are designing a gyroscope, an accelerometer, or an RF filter, you will find our System Modeling Extraction features indispensable.
General features
Tightly integrated into IntelliSuite's Thermo-Electro-Mechanical analysis tools
Ability to define areas or points of interest within a model
Automated or semi-automated behavioral model extraction.
Three levels of behavioral models of varying complexity can be generated.
Level 1 models. Models based on rigid body approximations. These capture up to 6 mechanical DOFs and multiple electrical DOFs. Useful for designing readout electronics
Level 2 models: Accurately capture second order effects such as parasitics, non-linear deformation, temperature effects and package related effects. Useful for designing compensation electronics
Level 3 models: Fully capture harmonic and sub-harmonic response of the devices. Useful for designing active controls of MEMS.
Behavioral modeling features
Support for arbitrary electrical & mechanical DOFs.
Capture moments of inertia (Ixx, Iyy, Izz, Ixy Iyz, Ixz), masses, 3D squeeze-film damping effects, non-linear spring constants (fully accounting for residual stresses and stress gradients)
Automated extraction of non-linear electrostatic forces (even for fringe field dominated devices)
Automatic calculation of modal contribution factors and modal energies. Fully capture of static, dynamic and harmonic response of devices
Behavioral model error bound estimation
Automatic formulation of device dynamics (Lagrangian formulation)
reduction algorithms, very large non-linear thermo-electromechanical FEM models can be reduced into computationally efficient behavioral models.
IntelliSuite system models are dynamic arbitrary degree of freedom models. The system models are not limited to small displacements; non-linear large displacement MEMS can be handled with panache. IntelliSuite is the only tool on the market that gives you the freedom to create arbitrary degree of freedom compact models to make sure that you capture all the important aspects of the device performance. The interface allows you to easily specify areas or nodes of interest. The device models can be compacted to a system model that you can then use in a system simulator.
