IntelliSuite™ Design Demonstration

Fabrication Simulation:
   Process Database
   Process Table
   Thin-film Material Properties

Mask Layout

Virtual Prototyping

Performance Analysis:
   Loads & Boundary Conditions
   Mesh Refinement
   Analysis
   Results
   System Level Design

Anisotropic Etch Simulation:
   Mask Layout
   Process Simulation
   Results

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Results

IntelliSuite results are displayed as tables, graphs, or animated 3D models. Here, in sequence, is the deformed mirror followed by animations of the first and fourth modes of natural frequency.