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[image 2 of 3] Process Database |
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IntelliSuite contains an extensive database of MEMS fabrication steps. This is divided into four categories: deposition, etch (etching and cleaning), bonding, and definition (wafers and masks). Under deposition, for example, are a variety of materials each of which has a number of different possible processes. Users can also add their own process steps to the database. |
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