IntelliSuite™ Design Demonstration

Fabrication Simulation:
   Process Database
   Process Table
   Thin-film Material Properties

Mask Layout

Virtual Prototyping

Performance Analysis:
   Loads & Boundary Conditions
   Mesh Refinement
   Analysis
   Results
   System Level Design

Anisotropic Etch Simulation:
   Mask Layout
   Process Simulation
   Results

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Loads & Boundary Conditions

Loads and boundary conditions are applied directly to the structure. On this structure we will be applying pressure loads to deform the mirror. The edges of the triangular posts will be fixed.